Refurbishing copper and indium containing alloy sputter targets and use of such targets in making copper and indium-based films

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United States of America Patent

PATENT NO 9399816
APP PUB NO 20130248351A1
SERIAL NO

13988621

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Abstract

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This invention relates to a method of refurbishing sputter targets comprising: providing a sputter target comprising a temperature sensitive alloy, having regions depleted of material; providing a powder having a first phase comprising the desired temperature sensitive alloy onto the surface; and pressing the powder onto the surface to form a refurbished target, at temperatures lower than that which would damage the temperature sensitive alloy.

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Patent Owner(s)

Patent OwnerAddress
DOW GLOBAL TECHNOLOGIES LLC2211 H H DOW WAY MIDLAND MI 48674

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Gerbi, Jennifer Midland, US 3 23
Nilsson, Robert Midland, US 7 29

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