Load port apparatus and clamping device to be used for the same

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9401295
APP PUB NO 20130028688A1
SERIAL NO

13556611

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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To suppress deformation of a portion to be clamped even when a load applied to the portion to be clamped is increased at the time of fixing a front opening unified pod (FOUP), a clamping arm pivotable between a retracting position and a clamping position about a rotational axis inclined relative to a bottom surface of the FOUP is arranged. The clamping arm is housed in a housing depression so that the clamping arm at the retracting position is situated below a surface of a mount base, and at the clamping position, protrudes from the surface of the mount base and becomes engageable with the portion to be clamped.

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First Claim

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Patent Owner(s)

Patent OwnerAddress
TDK CORPORATIONTOKYO

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Igarashi, Hiroshi Tokyo, JP 200 3076
Okabe, Tsutomu Tokyo, JP 53 817

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