Calibration of MEMS sensor

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United States of America Patent

PATENT NO 9403671
APP PUB NO 20140083164A1
SERIAL NO

14116092

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Abstract

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A micro electromechanical systems (MEMS) sensor is excited. The response of the MEMS sensor is measured. The MEMS sensor is calibrated.

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Patent Owner(s)

Patent OwnerAddress
HEWLETT-PACKARD DEVELOPMENT COMPANY L P11445 COMPAQ CENTER DRIVE WEST HOUSTON TX 77070

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bicknell, Robert Newton Corvallis, US 13 96
Homeijer, Brian D Corvallis, US 9 30

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