Scratch detection method and apparatus

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United States of America Patent

PATENT NO 9406115
APP PUB NO 20130216122A1
SERIAL NO

13806360

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Abstract

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A method of identifying discontinuities in the surface of a substrate is herein disclosed. An object plane of an imaging system is positioned at a focal position associated with a discontinuity and an image is captured, the discontinuity having a relatively higher contrast with respect to the remainder of the surface of the substrate. The discontinuity is thereby more readily discernable than when the focal plane is positioned at the surface of the substrate. Analysis of discontinuities may include the extraction of discontinuity characteristics.

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Patent Owner(s)

Patent OwnerAddress
ONTO INNOVATION INC16 JONSPIN ROAD WILMINGTON MA 01887

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Grant, Michael Minneapolis, US 49 751
Zhou, Wei Saint Paul, US 693 3759

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