Spin coatable metallic hard mask compositions and processes thereof

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9409793
APP PUB NO 20150200090A1
SERIAL NO

14154929

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Abstract

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The present invention relates to a novel spin coatable composition comprising

    (a) metallosilicic acid; (b) at least one compound comprising two or more 4-hydroxyphenyl groups; and, c) a solvent. The component b) can be a 4-hydroxyphenyl compound of structure (I) wherein W is a linking group chosen from the group consisting of an organic linking moiety, a heteroatom containing linking moiety and a direct valence bond, m is a positive integer of 1 and n is a positive integer equal to 1 or and Ri, Rii, Riii and Riv are independently chosen substituents from a group consisting of hydrogen, (C1-C6) alkyl, (C1-C6) alkoxy, (C6-C20) aryl, halides (such as Cl, I, F), hydroxyl, alkylcarbonyl (alkyl-C(═O)—), alkylcarbonyloxy (alkyl-C(═O)—O—), alkyloxycarbonyl (alkyl-O—C(═O)—), alkyloxycarbonyloxy (alkyl-O—C(═O)—O—) and mixtures of these; and a solvent.

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Patent Owner(s)

Patent OwnerAddress
MERCK PATENT GMBH64293 DARMSTADT

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chada, Venkata Gopal Reddy Bridgewater, US 13 522
Cho, JoonYeon Bridgewater, US 18 129
Dioses, Alberto D Doylestown, US 10 150
Mullen, Salem Florham Park, US 4 46
Padmanaban, Munirathna Bridgewater, US 55 922
Wolfer, Elizabeth Bethlehem, US 8 74
Yao, Huirong Plainsboro, US 27 278

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