Device for measuring a pressure with at least one pressure sensor having at least one active sensor surface

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United States of America Patent

PATENT NO 9410862
APP PUB NO 20140174188A1
SERIAL NO

14085949

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Abstract

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A device for measuring pressure having at least one pressure sensor with at least one active sensor surface, an oscillating and/or variable temperature counter-surface arranged opposite the at least one sensor surface, wherein the sensor surface and the counter-surface are arranged in a hollow body, and the hollow body has at least one opening, and wherein at least one alternating signal amplifier is provided.

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Patent Owner(s)

Patent OwnerAddress
PFEIFFER VACUUM GMBHBERLINER STRASSE 43 D-35614 ASSLAR

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Conrad, Armin Herborn, DE 27 228

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