Vacuum pump controller

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United States of America Patent

PATENT NO 9411341
APP PUB NO 20130317640A1
SERIAL NO

13900542

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Abstract

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A vacuum pump controller and a method of making a devise using the same are presented. The vacuum pump controller comprises detectors for detecting whether a cassette is present in a semiconductor processing load lock; and controllers for sending control signals to a vacuum pump to control the speed voltage of the vacuum pump. The vacuum pump controller may further send control signals to control the supply of N2/H2 gas, cooling water and other vacuum pump accessories.

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Patent Owner(s)

Patent OwnerAddress
ALSEPHINA INNOVATIONS INC303 TERRY FOX DRIVE SUITE 300 OTTAWA K2K 3J1

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Lee, Chin Fong Singapore, SG 3 30
Yeap, Chuin Boon Singapore, SG 3 48
Zhu, Ming Singapore, SG 242 1962

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