Shallow trench isolation for end fin variation control

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United States of America Patent

PATENT NO 9412643
APP PUB NO 20150270264A1
SERIAL NO

14732881

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Abstract

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A method of fabricating a fin field effect transistor (FinFET) device and the device are described. The method includes forming a deep STI region adjacent to a first side of an end fin among a plurality of fins and lining the deep STI region, including the first side of the end fin, with a passivation layer. The method also includes depositing an STI oxide into the deep STI region, the passivation layer separating the STI oxide and the first side of the end fin, etching back the passivation layer separating the STI oxide and the first side of the end fin to a specified depth to create a gap, and depositing gate material, the gate material covering the gap.

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Patent Owner(s)

  • INTERNATIONAL BUSINESS MACHINES CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Basker, Veeraraghavan S Schenectady, US 487 4267
Liu, Zuoguang Schenectady, US 156 1106
Yamashita, Tenko Schenectady, US 599 4944
Yeh, Chun-Chen Clifton Park, US 417 3455

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