Apparatus and methods for molded underfills in flip chip packaging

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United States of America Patent

PATENT NO 9412717
APP PUB NO 20130115735A1
SERIAL NO

13289719

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Methods and apparatus for a forming molded underfills. A method is disclosed including loading a flip chip substrate into a selected one of the upper mold chase and lower mold chase of a mold press at a first temperature; positioning a molded underfill material in the at least one of the upper and lower mold chases while maintaining the first temperature which is lower than a melting temperature of the molded underfill material; forming a sealed mold cavity and creating a vacuum in the mold cavity; raising the temperature of the molded underfill material to a second temperature greater than the melting point to cause the molded underfill material to flow over the flip chip substrate forming an underfill layer and forming an overmolded layer; and cooling the flip chip substrate to a third temperature substantially lower than the melting temperature of the molded underfill material. An apparatus is disclosed.

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Patent Owner(s)

Patent OwnerAddress
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY8 LI-HSIN RD 6 HSINCHU SCIENCE PARK HSINCHU 300-78

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Meng-Tse Changzhi Township, TW 100 1568
Cheng, Ming-Da Jhubei, TW 447 4774
Lin, Chun-Cheng New Taipei, TW 100 1465
Lin, Hsiu-Jen Zhubei, TW 172 1408
Liu, Chung-Shi Hsin-Chu, TW 824 11367
Lu, Wen-Hsiung Jhonghe, TW 127 2473

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