Method for treating inner surface of chlorine trifluoride supply passage in apparatus using chlorine trifluoride

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United States of America Patent

PATENT NO 9416445
APP PUB NO 20150041430A1
SERIAL NO

14374728

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Abstract

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Provided is a method for treating the inner surface of a chlorine trifluoride supply passage that enables reliable prevention of the reduction in the concentration of ClF3 in a reaction chamber during process operation.

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Patent Owner(s)

Patent OwnerAddress
IWATANI CORPORATIONOSAKA 541-0053

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Koike, Kunihiko Moriyama, JP 20 624
Manabe, Toshiki Osaka, JP 6 178
Saeda, Manabu Moriyama, JP 2 112
Yoshino, Yu Moriyama, JP 9 308

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