Semiconductor device having a graphene interconnect

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United States of America Patent

PATENT NO 9418938
APP PUB NO 20150262940A1
SERIAL NO

14336134

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Abstract

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A semiconductor device includes a graphene interconnect, an insulation film formed on the graphene interconnect, and a via conducting portion formed in a via hole provided in the graphene interconnect and the insulation film. The graphene interconnect has a region containing an impurity at least around the via hole.

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Patent Owner(s)

Patent OwnerAddress
KIOXIA CORPORATIONTOKYO

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kajita, Akihiro Yokkaichi, JP 77 792
Kitamura, Masayuki Yokkaichi, JP 98 1131
Miyazaki, Hisao Yokohama, JP 36 62
Sakai, Tadashi Yokohama, JP 166 1887
Sakata, Atsuko Yokkaichi, JP 92 849

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