Rinsing apparatus and rinsing method for polycrystalline silicon lump
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United States of America Patent
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Aug 23, 2016
Grant Date -
Feb 26, 2015
app pub date -
Oct 8, 2014
filing date -
Aug 31, 2009
priority date (Note) -
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status (Latency Note)
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Abstract
A rinsing apparatus for polycrystalline silicon lump which is obtained by cutting or breaking a rod of polycrystalline silicon, including: a wash basket having a plurality of through holes, which carries the polycrystalline silicon lump; a wash tank in which the wash basket is provided therein, in which rinse water is continuously supplied from a water supply port which is arranged at a bottom part of the wash tank; an inner cage having a plurality of openings which is smaller than the through holes of the wash basket at a bottom part thereof, provided in the wash tank, in which the wash basket is stored therein; and a swing device holding and swinging the wash basket in the inner cage, and: an overflow part which recovers the rinse water overflowed from an upper portion of the wash tank is provided at the wash tank.
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