Processing apparatus and shield

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9422619
APP PUB NO 20140283743A1
SERIAL NO

14296505

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A processing apparatus includes a substrate holding portion, a shield arranged to surround a substrate, and a shield holding portion configured to hold the shield. The shield includes first magnets each having a magnetic pole of a first polarity facing the shield holding portion, and second magnets each having a magnetic pole of a second polarity facing the shield holding portion. The first magnets and the second magnets are arranged at positions symmetrical with respect to the center of the shield. The shield holding portion includes third magnets each having a magnetic pole of the first polarity facing the shield, and fourth magnets each having a magnetic pole of the second polarity facing the shield.

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First Claim

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Patent Owner(s)

Patent OwnerAddress
CANON ANELVA CORPORATIONKAWASAKI-SHI

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Yasumatsu, Yasushi Inagi, JP 18 79

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