Electrostatic discharge devices and methods of manufacture
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United States of America Patent
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Aug 23, 2016
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app pub date -
Oct 14, 2015
filing date -
May 28, 2014
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Abstract
Electrostatic discharge (ESD) devices and methods of manufacture are provided. The method includes forming a plurality of fin structures and a mesa structure from semiconductor material. The method further includes forming an epitaxial material with doped regions on the mesa structure and forming gate material over at least the plurality of fin structures. The method further includes planarizing at least the gate material such that the gate material and the epitaxial material are of a same height. The method further includes forming contacts in electrical connection with respective ones of the doped regions of the epitaxial material.
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