Accoustic resonator having composite electrodes with integrated lateral features

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United States of America Patent

PATENT NO 9425764
APP PUB NO 20140118088A1
SERIAL NO

13660941

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Abstract

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A bulk acoustic wave (BAW) resonator device includes a bottom electrode on a substrate over one of a cavity and an acoustic reflector, a piezoelectric layer on the bottom electrode, and a top electrode on the piezoelectric layer. At one of the bottom electrode and the top electrode is a composite electrode having an integrated lateral feature, arranged between planar top and bottom surfaces of the composite electrode and configured to create a cut-off frequency mismatch.

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Patent Owner(s)

  • AVAGO TECHNOLOGIES GENERAL IP (SINGAPORE) PTE. LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Burak, Dariusz Fort Collins, US 75 1733
Choy, John Westminster, US 64 2228
Feng, Chris Fort Collins, US 41 1251
Nikkel, Phil Loveland, US 51 1511

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