Nano- and micro-electromechanical resonators

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United States of America Patent

PATENT NO 9425765
SERIAL NO

14784876

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Abstract

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A resonator including a piezoelectric plate and an interdigital electrode is provided. A ratio between a thickness of the plate and a pitch of the interdigital electrode may be from about 0.5 to about 1.5. A radiation detector including a resonator and an absorber layer capable of absorbing at least one of infrared and terahertz radiation is provided. A resonator including a piezoelectric plate and a two-dimensional electrically conductive material is provided.

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Patent Owner(s)

Patent OwnerAddress
NORTHEASTERN UNIVERSITY360 HUNTINGTON AVENUE BOSTON MA 02115

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hui, Yu Malden, US 40 441
Qian, Zhenyun Boston, US 12 240
Rinaldi, Matteo Boston, US 31 341

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