Salt, photoresist composition and method for producing photoresist pattern

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United States of America Patent

PATENT NO 9428485
APP PUB NO 20120315580A1
SERIAL NO

13491370

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Abstract

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A salt represented by formula (I):

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Patent Owner(s)

Patent OwnerAddress
SUMITOMO CHEMICAL COMPANY LIMITEDTOKYO 103-6020

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Masuyama, Tatsuro Osaka, JP 69 347
Mukai, Yuichi Osaka, JP 20 93

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