Method of replacing an existing contact of a wafer probing assembly

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United States of America Patent

PATENT NO 9429638
SERIAL NO

13854725

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Abstract

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The contacts of a probing apparatus are elastically supported on a replaceable coupon and electrically interconnected with conductors on a membrane or a space transformer.

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Patent Owner(s)

  • CASCADE MICROTECH, INC.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Smith, Kenneth R Beaverton, US 111 3320

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