Comb structure for a disk drive suspension piezoelectric microactuator operating in the D33 mode, and method of manufacturing the same
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United States of America Patent
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Aug 30, 2016
Grant Date -
N/A
app pub date -
Feb 11, 2015
filing date -
Feb 17, 2014
priority date (Note) -
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Abstract
A microactuator assembly is formed by depositing PZT material over electrode gaps, the electrode gaps being defined by the spaces between interleaved fingers of metal that define alternating plus and minus electrodes. The PZT material is hardened and poled. The PZT material may be deposited and poled either as isolated islands of PZT material across respective electrode gaps, or as a continuous sheet of PZT material with localized areas of that material being poled and then activated. The individual PZT elements are arranged such that successive PZT elements extend in the same direction as across the electrode gaps. The resulting microactuator assembly acts in the d33 direction of the PZT elements. The electrodes have raised or recessed features such as ribs or castellations, with the PZT material mating with those features, thus anchoring the PZT material to the electrodes.
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