CMOS MOEMS sensor device

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United States of America Patent

PATENT NO 9435822
APP PUB NO 20120154812A1
SERIAL NO

13378234

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Abstract

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The present invention relates to a sensor device. More particularly, the invention relates to a CMOS-based micro-optical-electromechanical-sensor (MOEMS) device with silicon light emitting devices, silicon waveguides and silicon detectors being fabricated using current Complementary Metal Oxide Semiconductor (CMOS) technology or Silicon on Insulator (SOI) technology. According to the invention there is provided a sensor comprising: a Silicon-based light emitting structure; an integrated electro-optical mechanical interface structure that is capable to sense mechanical deflections; an integrated electronic driving and processing circuitry so as to detect physical parameters such as vibration, motion, rotation, acceleration.

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Patent Owner(s)

Patent OwnerAddress
TSHWANE UNIVERSITY OF TECHNOLOGYSTAATSARTELLERIE ROAD PRETORIA WEST PRETORIA GAUTENG 0183

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Snyman, Lukas Willem Faerie Glen, ZA 9 60

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