Focusing optical systems and methods for testing semiconductors

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United States of America Patent

PATENT NO 9435858
SERIAL NO

13634009

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Abstract

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Focusing optical systems and methods for testing semiconductors are disclosed herein. The methods include receiving an image of a probe through a single optical path of a microscope, substantially focusing the microscope on the probe, and determining a vertical height adjustment between the probe and a device under test based upon the focusing.

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Patent Owner(s)

  • CASCADE MICROTECH, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Andrews, Peter Beaverton, US 91 2523
Hess, David Beaverton, US 36 232

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