Insulated dielectric window assembly of an inductively coupled plasma processing apparatus

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United States of America Patent

PATENT NO 9437400
APP PUB NO 20130292055A1
SERIAL NO

13462305

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Abstract

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An insulated dielectric window assembly comprising a dielectric window of an inductively coupled plasma processing apparatus; an upper polymeric ring, and a lower polymeric ring. The upper polymeric ring insulates the outer edge of the dielectric window from a cooler ambient atmosphere and the lower polymeric ring insulates the lower surface of the dielectric window from a chamber surface supporting the window.

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Patent Owner(s)

  • LAM RESEARCH CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bhattacharyya, Gautam San Ramon, US 9 876
Richardson, Brett C San Ramon, US 25 672
Setton, David Danville, US 8 26

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