Sputtering apparatus

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9437404
APP PUB NO 20130299345A1
SERIAL NO

13889538

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Abstract

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A sputtering apparatus is provided with an elongated target holder, a substrate holder having a substrate receiving surface, and a mask assembly having an opening configured between the target holder and the substrate holder. The mask assembly is comprised of a first and second masking part having facing edges that form the opening and are disposed parallel to the substrate receiving surface and independently movable in a direction perpendicular to the length of the target holder and parallel to the substrate receiving surface, or in a direction perpendicular to the substrate receiving surface.

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Patent Owner(s)

  • SEAGATE TECHNOLOGY LLC

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Abarra, Noel Fuchu, JP 3 24
Endo, Tetsuya Fuchu, JP 30 346

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