Storage container, shutter opening/closing unit of storage container, and wafer stocker using storage container and shutter opening/closing unit
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United States of America Patent
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Sep 6, 2016
Grant Date -
Jan 29, 2015
app pub date -
Oct 14, 2014
filing date -
Apr 16, 2012
priority date (Note) -
In Force
status (Latency Note)
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Abstract
Provided is a wafer stocker that can prevent the inflow of an external atmosphere, maintain a wafer storage space at a desired atmosphere with a relatively small amount of gas, and prevent dust from being attached to a wafer surface. A shutter portion, including multiple shield plates having the same height as an interval between shelf plates disposed in a storage container, is disposed with a slight space from a body portion, and by supplying clean gas into the storage container, a clean atmosphere of a higher pressure than an external environment is maintained, and a shutter portion is opened and closed by moving up and down the shield plate independently from the shelf plate that supports a wafer.
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