Cryopump and method for regenerating the cryopump

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United States of America Patent

PATENT NO 9440165
APP PUB NO 20130227968A1
SERIAL NO

13782420

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Abstract

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A method for regenerating a cryopump includes stopping a pressure sensor for the cryopump, starting to heat a cryogenic surface for adsorbing gas molecules, starting the rough evacuation of the cryopump while the pressure sensor is stopped, and terminating the rough evacuation while the pressure sensor is stopped. This method may include activating the pressure sensor after the rough evacuation has been terminated.

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Patent Owner(s)

  • SUMITOMO HEAVY INDUSTRIES, LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Takahashi, Kakeru Tokyo, JP 27 25

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