Non-planar glass polishing pad and method of manufacture
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United States of America Patent
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Sep 13, 2016
Grant Date -
Jan 23, 2014
app pub date -
Jun 10, 2013
filing date -
Jul 23, 2012
priority date (Note) -
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Abstract
A polishing pad, for polishing of a work piece having portions that are non-planar, the polishing pad comprising a first side and a second side of the polishing pad. The first side is substantially flat, and the second side is configured to polish the non-planar work piece. The polishing pad further comprises a concentric annular channel in the polishing pad, wherein the concentric annular channel comprises a channel surface, wherein the second side of the polishing pad comprises an inner surface, the channel surface, and an outer surface, and wherein the channel surface is recessed relative to the inner surface and outer surface. The polishing pad further comprises a plurality of islands located within the concentric annular channel, wherein the islands comprise an island surface that is raised relative to the channel surface.
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