SEMICONDUCTOR MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME

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United States of America Patent

APP PUB NO 20160276364A1
SERIAL NO

14848870

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Abstract

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According to an embodiment, a semiconductor memory device comprises: a memory string comprising memory cells; and a contact electrically connected to one end of the memory string. The memory string comprises: control gate electrodes stacked above a first semiconductor layer; a second semiconductor layer having one end connected to the first semiconductor layer and having as its longitudinal direction a direction perpendicular to the first semiconductor layer, the second semiconductor layer facing the control gate electrodes; and a charge accumulation layer positioned between the control gate electrode and the second semiconductor layer. The contact has a plate-like shape whose longitudinal direction is a first direction, the contact has its lower surface connected to the first semiconductor layer, and the contact has a height of at least part of its upper surface lower than a height of an upper surface of the second semiconductor layer.

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Patent Owner(s)

Patent OwnerAddress
KIOXIA CORPORATIONTOKYO

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
HU, Ming Yokkaichi, JP 233 1283
SONODA, Masahisa Yokkaichi, JP 25 154
TAKEWAKI, Toshiyuki Yokkaichi, JP 62 503

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