Solid-state image sensor and image pickup apparatus including the same
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United States of America Patent
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Sep 13, 2016
Grant Date -
Aug 11, 2016
app pub date -
Feb 4, 2016
filing date -
Feb 10, 2015
priority date (Note) -
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Abstract
A solid-state image sensor includes pixels each including first and second photoelectric conversion portions provided in a substrate, the second photoelectric conversion portion having lower sensitivity than the first photoelectric conversion portion; a barrier region provided between the first and second photoelectric conversion portions; a waveguide provided on a light-entrance side of the substrate and including a core and a cladding; and a protective layer provided between the waveguide and the substrate. Seen in a direction perpendicular to the substrate, a center of an exit face of the core is on a first-photoelectric-conversion-portion side with respect to a center of the barrier region in each pixel in a central part of a pixel area. A standard deviation of a refractive-index distribution of the protective layer in a region directly below the exit face of the core is 0.1 or smaller in an in-plane direction of the substrate.
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