Variable wavelength interference filter, optical filter device, optical module, and electronic apparatus
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United States of America Patent
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Sep 20, 2016
Grant Date -
Apr 4, 2013
app pub date -
Sep 4, 2012
filing date -
Sep 29, 2011
priority date (Note) -
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Abstract
A variable wavelength interference filter includes a stationary substrate, a movable substrate bonded to the stationary substrate, a stationary reflecting film provided to the stationary substrate, a movable reflecting film provided to the movable substrate, and opposed to the stationary reflecting film across an inter-reflecting film gap, and an electrostatic actuator adapted to vary the gap amount of the inter-reflecting film gap by deflecting the movable substrate toward the stationary substrate, a releasing space to which air between the stationary reflecting film and the movable reflecting film moves when the gap amount of the inter-reflecting film gap is reduced is provided between the stationary substrate and the movable substrate, and assuming that a spring constant of the movable substrate is kv, and a spring constant of the air existing in the inter-reflecting film gap is kair, kv≧20×kair is satisfied.
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