Impedance matching device, linear motion module, and radio frequency power supply device

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9450559
APP PUB NO 20150349740A1
SERIAL NO

14738386

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An impedance matching device includes a first variable capacitor connected to an RF power source and including a first shaft moving linearly, a first linear motion unit axially coupled to the first shaft of the first variable capacitor to provide linear motion, a first insulating joint connecting the first shaft to a first driving shaft of the first linear motion unit, and a first displacement sensor adapted to measure a movement distance of the first driving shaft of the first linear motion unit.

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Patent Owner(s)

  • PLASMART INC.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Lee, Wonoh Daejeon, KR 5 7

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