Charged particle beam apparatus
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United States of America Patent
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Sep 27, 2016
Grant Date -
Sep 24, 2015
app pub date -
Mar 23, 2015
filing date -
Mar 24, 2014
priority date (Note) -
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status (Latency Note)
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Abstract
A charged particle beam apparatus is provided with a controller configured to control other components and perform operations including: an irradiating operation to irradiate a first position of a sample with a charged particle beam while gradually changing a scan range of the charged particle beam to move from a first position; a first image acquiring operation to acquire an image of each portion where the charged particle beam moves; an indicator forming operation to form an indicator at a second position by the charged particle beam when the scan range of the charged particle beam reaches the second position; a second image acquiring operation to acquire an image of the second position in a state where the indicator is formed; and an adjusting operation to adjust relative position between the stage and the scan range of the charged particle beam.
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