Drawing apparatus, and method of manufacturing article
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United States of America Patent
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Sep 27, 2016
Grant Date -
Oct 30, 2014
app pub date -
Apr 23, 2014
filing date -
Apr 30, 2013
priority date (Note) -
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status (Latency Note)
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Abstract
The present invention provides a drawing apparatus for performing drawing on a substrate with a charged particle beam, including a stage configured to hold the substrate and be moved, a charged particle optical system configured to irradiate a plurality of charged particle beams arrayed along a first axis, and a controller configured to control the drawing so as to perform multiple irradiation of a target portion on the substrate with the plurality of charged particle beams, wherein the controller configured to control the drawing such that the stage is moved in one direction along the first axis with respect to a plurality of regions formed on the substrate along the first axis, and a deflection of charged particle beam for a displacement of charged particle beam along the first axis is performed with respect to drawing on each of the plurality of regions.
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