Substrate processing method

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United States of America Patent

PATENT NO 9455134
APP PUB NO 20150179431A1
SERIAL NO

14639423

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Abstract

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A hydrophobizing agent vapor is supplied to a substrate and a surface of the substrate including a pattern is hydrophobized. Thereafter, the substrate is dried by vaporizing the hydrophobizing agent. The substrate to be processed is maintained in a state of not contacting water until it is dried after being hydrophobized. Collapse of a pattern formed on the substrate surface is thereby suppressed or prevented.

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Patent Owner(s)

Patent OwnerAddress
SCREEN HOLDINGS CO LTDKYOTO-SHI KYOTO 602-8585

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Emoto, Tetsuya Kyoto, JP 11 100
Kimura, Masahiro Kyoto, JP 229 2575
Kojimaru, Tomonori Kyoto, JP 9 110
Okutani, Manabu Kyoto, JP 46 2014
Otsuji, Masayuki Kyoto, JP 38 117

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