Ultrasonic probe and ultrasonic inspection apparatus

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United States of America Patent

PATENT NO 9456803
APP PUB NO 20160007963A1
SERIAL NO

14859901

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Abstract

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An ultrasonic probe includes a substrate, a diaphragm, a thin-film piezoelectric element, a communication passage, and an air hole. The substrate has first and second cavities thereon. The diaphragm is configured at the first cavity. The thin-film piezoelectric element is configured to the diaphragms. The communicating passage is configured in the substrate and extending from the first cavity to the second cavity. The air hole extends between the communicating passage to an outside of the substrate.

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Patent Owner(s)

  • SEIKO EPSON CORPORATION

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hosomi, Hiroaki Minowa-machi, JP 25 334
Nakamura, Tomoaki Nagano, JP 151 1981

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