Fluid ejection apparatuses including a substrate with a bulk layer and a epitaxial layer
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United States of America Patent
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Oct 4, 2016
Grant Date -
May 12, 2016
app pub date -
Jun 28, 2013
filing date -
Jun 28, 2013
priority date (Note) -
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Abstract
Examples of fluid ejection apparatuses and methods for making fluid ejection apparatuses are described. An example method may include forming a fluid feed slot in a bulk layer of a substrate, forming a plurality of ink feed channels in at least an epitaxial layer of the substrate, each of the ink feed channels fluidically coupled to the fluid feed slot, and forming a plurality of drop generators over the substrate such that the epitaxial layer of the substrate is between the plurality of drop generators and the bulk layer and such that the each of the drop generators is fluidically coupled to the fluid feed slot by at least one of the ink feed channels.
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