Vibration isolation system with support divided into sections, and method for controlling same

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United States of America Patent

PATENT NO 9458908
APP PUB NO 20150069205A1
SERIAL NO

14463053

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Abstract

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A vibration isolation system which comprises a support divided into a plurality of rigid sections on which a displaceable stage is arranged. The sections are arranged on pneumatic bearings, and the pneumatic bearings of the individual sections are controlled independently from each other and based on the position of the displaceable stage.

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Patent Owner(s)

Patent OwnerAddress
INTEGRATED DYNAMICS ENGINEERING GMBHHERMANNSTRASSE 9-13 65479 RAUNHEIM 65479

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kropp, Peter A Mainz, DE 5 30
Moneer, Shatat-Herres Raunheim, DE 1 2
Pabst, Mario Muehlhausen, DE 1 2

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