Guide plate for probe card

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9459287
APP PUB NO 20140266275A1
SERIAL NO

14206896

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Abstract

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The invention provides a guide plate for a probe card including a silicon substrate including a surface and a through-hole, an edge part of the through-hole, and a curved-face part. The through-hole is configured to guide a probe and includes an inner wall face. The edge part of the through-hole is constituted by the surface of the silicon substrate and the inner wall face of the through-hole. The curved-face part is formed on the edge part and formed of a silicon dioxide film.

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Patent Owner(s)

Patent OwnerAddress
JAPAN ELECTRONIC MATERIALS CORPORATION2-5-13 NISHINAGASU-CHO AMAGASAKI-SHI HYOGO 6600805 ?6600805

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fujihara, Kosuke Nagano, JP 8 26
Kimura, Teppei Amagasaki, JP 13 100
Shiraishi, Akinori Nagano, JP 80 1156

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