Batch fabrication method of three-dimensional photonic microstructures

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United States of America Patent

PATENT NO 9459381
APP PUB NO 20150247954A1
SERIAL NO

14635186

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Abstract

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Provided is a batch fabrication method of three-dimensional photonic microstructures including a support structure fabricating step, a variable structure fabricating step, a thermal reflow step, and a three-dimensional photonic microstructure forming step. The batch fabrication method of three-dimensional photonic microstructures fabricates three-dimensional photonic microstructures having several shapes depending on a demand of a user through these steps.

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Patent Owner(s)

  • KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Jeong, Ki-Hun Daejeon, KR 91 609
Keum, Dongmin Daegu, KR 11 39
Kim, Jae-Jun Daegu, KR 31 409

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