Hybrid-guided block copolymer assembly

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United States of America Patent

PATENT NO 9460747
APP PUB NO 20150356989A1
SERIAL NO

14830534

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Abstract

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A method for nano-patterning includes imprinting features in a resist with an imprint mold to form one or more topographic surface patterns on the imprinted resist. A block copolymer (“BCP”) material is deposited on the imprinted resist, wherein a molecular dimension L0 of the BCP material correlates by an integer multiple to a spacing dimension of the one or more topographic surface patterns on the imprinted resist. The deposited BCP is annealed and at least a portion of the annealed BCP is removed, forming a template having discrete domains.

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Patent Owner(s)

  • SEAGATE TECHNOLOGY LLC

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hu, Wei Newark, US 319 4875
Kuo, David S Palo Alto, US 99 357
Lee, Kim Y Fremont, US 71 428
Wago, Koichi Sunnyvale, US 71 887
Xu, Yuan Fremont, US 111 999

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