Variable capacitor and switch structures in single crystal piezoelectric MEMS devices using bimorphs

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United States of America Patent

PATENT NO 9466430
APP PUB NO 20140125201A1
SERIAL NO

14071025

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Abstract

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A micro-electrical-mechanical systems (MEMS) device includes a substrate, one or more anchors formed on a first surface of the substrate, and a piezoelectric layer suspended over the first surface of the substrate by the one or more anchors. A first electrode may be provided on a first surface of the piezoelectric layer facing the first surface of the substrate, such that the first electrode is in contact with a first bimorph layer of the piezoelectric layer. A second electrode may be provided on a second surface of the piezoelectric layer opposite the first surface, such that the second electrode is in contact with a second bimorph layer of the piezoelectric layer.

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Patent Owner(s)

  • QORVO US, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bhattacharjee, Kushal Kernersville, US 31 1354

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