Method of manufacturing solid-state imaging apparatus
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United States of America Patent
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Oct 11, 2016
Grant Date -
Aug 20, 2015
app pub date -
Jan 20, 2015
filing date -
Feb 18, 2014
priority date (Note) -
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Abstract
A method of manufacturing a solid-state imaging apparatus, comprising preparing a substrate on which photoelectric conversion portions are arranged, forming inner lenses corresponding to the photoelectric conversion portions, and forming microlenses corresponding to the photoelectric conversion portions, wherein the forming inner lenses includes forming, on the substrate, a dielectric film for forming the plurality of inner lenses, and etching second portions of the dielectric film around first portions serving as central portions of the inner lenses while leaving upper faces of the first portions, so as to form curved faces or inclined faces connected to the upper faces.
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