Microfluid delivery device and method for manufacturing the same

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United States of America Patent

PATENT NO 9469109
APP PUB NO 20160121607A1
SERIAL NO

14531830

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Abstract

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Embodiments disclose herein are directed to a microfluidic delivery device that has a predominantly semiconductor structure, such as silicon. In particular, the structure for delivering fluid may be formed from polycrystalline silicon, also called polysilicon, or epitaxial silicon. The microfluidic delivery device that predominantly uses silicon based materials to form the structures that are in contact with the dispensed fluid results in a device that is compatible with a wide set of fluids and applications.

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Patent Owner(s)

  • STMICROELECTRONICS S.R.L.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Carminati, Marta Casatenovo, IT 7 7
Castoldi, Laura Maria Abbiategrasso, IT 12 68
Faralli, Dino Milan, IT 21 209
Ferrari, Paolo Gallarate, IT 90 924

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