Physical quantity sensor
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United States of America Patent
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Oct 25, 2016
Grant Date -
Jun 18, 2015
app pub date -
May 28, 2013
filing date -
May 29, 2012
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Abstract
A physical quantity sensor has a resonance frequency f1 in same-phase mode and a resonance frequency f3 in same-phase absorptive mode greater than the resonance frequency f1. An absolute value Δf3 is a difference between the resonance frequency f3 in the same-phase absorptive mode and a value that is the product of the resonance frequency f1 in the same-phase mode multiplied by n; an avoidance difference D indicates a degree of deviation of the absolute value Δf3 from the resonance frequency f1 in the same-phase mode. A relation (Δf3>n·f1·D) is satisfied, and, simultaneously, the avoidance difference D is provided to be greater than 0%. This can avoid the vibrational excitation by resonance interference from becoming the maximum displacement.
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