Integrated light optics and gas delivery in a charged particle lens
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United States of America Patent
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Oct 25, 2016
Grant Date -
Dec 31, 2015
app pub date -
Jun 30, 2014
filing date -
Jun 30, 2014
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A method and apparatus for directing light or gas or both to a specimen positioned within about 2 mm from the lower end of a charged particle beam column. The charged particle beam column assembly includes a platform defining a specimen holding position and has a set of electrostatic lenses each including a set of electrodes. The assembly includes a final electrostatic lens that includes a final electrode that is closest to the specimen holding position. This final electrode defines at least one internal passageway having a terminus that is proximal to and directed toward the specimen holding position.
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