Charged particle beam apparatus and image generation method

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9478392
APP PUB NO 20160064182A1
SERIAL NO

14803304

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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There is provided a charged particle beam apparatus radiating a charged particle beam to a specimen so as to acquire an image of the specimen, the charged particle beam apparatus including: a charged particle gun that generates the charged particle beam; an electron optical system that radiates the charged particle beam emitted from the charged particle gun onto a surface of the specimen so as to scan the surface of the specimen; a detecting unit that detects secondary electrons or reflection electrons emitted from the specimen, and converts the electrons into pulse signals; a pulse signal detecting circuit that detects time detecting information regarding time of the pulse signals converted by the detecting unit, and peak value detecting information regarding each peak value of the pulse signals; and an image processing unit that generates luminance gradation of the acquired image based on a time detecting signal and a peak value detecting signal of the pulse signals detected by the pulse signal detecting circuit.

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Patent Owner(s)

  • HITACHI HIGH-TECHNOLOGIES CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ikeda, Kazuki Tokyo, JP 42 258
Kadoi, Ryo Tokyo, JP 17 94
Kanai, Hisaaki Tokyo, JP 16 69
Kawano, Hajime Tokyo, JP 94 787
Li, Wen Tokyo, JP 347 5045
Suzuki, Makoto Tokyo, JP 471 4793
Takahashi, Hiroyuki Tokyo, JP 707 14572

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