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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
SIEMENS AKTIENGESELLSCHAFT	WITTELSBACHERPLATZ 2 MUENCHEN 80333

International Classification(s)

• H01P:WAVEGUIDES; RESONATORS, LINES OR OTHER DEVICES OF ....
• H03B:GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUEN....
• H05H:PLASMA TECHNIQUE

• [Classification Symbol]

• [Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Heid, Oliver	Erlangen, DE	159	1228
Hughes, Timothy	Erlangen, DE	81	286

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date
11.5 Year Payment	$7400.00	$3700.00	$1850.00	Apr 25, 2028

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge - 11.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
October 25, 2016	US,9478841,B2   US9478841B2	GRANTED PATENT AS SECOND PUBLICATION
March 20, 2014	US,20140077729,A1   US20140077729A1	FIRST PUBLISHED PATENT APPLICATION

Full Text

US Patent No: 9478841

RF generator

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