Method of manufacturing an ink-jet printhead
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United States of America Patent
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Nov 1, 2016
Grant Date -
Sep 17, 2015
app pub date -
Mar 17, 2015
filing date -
Jun 7, 2010
priority date (Note) -
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Abstract
A method of manufacturing an ink jet printhead includes: providing a silicon substrate including active ejecting elements; providing a hydraulic structure layer; providing a silicon orifice plate having a plurality of nozzles for ejection of said ink; and assembling the silicon substrate with said hydraulic structure layer and said silicon orifice plate. Providing the silicon orifice plate comprises: providing a silicon wafer having a substantially planar extension delimited by a first and a second surfaces; performing a thinning step at the second surface so as to remove a central portion having a preset height; and forming in the silicon wafer a plurality of through holes, each defining a respective nozzle for ejection of the ink.
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