Method for transferring substrate using vacuum roll-to-roll device

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United States of America Patent

PATENT NO 9481535
APP PUB NO 20130064978A1
SERIAL NO

13435626

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Abstract

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A vacuum roll-to-roll device includes: a first chamber; a second chamber neighboring the first chamber; a shutter disposed between the first chamber and the second chamber; a sealing member attached to the shutter; and a roll-type substrate which moves from the first chamber to the second chamber through the sealing member. A thickness of a lateral side of the roll-type substrate decreases in a direction toward an edge thereof.

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Patent Owner(s)

Patent OwnerAddress
SAMSUNG DISPLAY CO LTDGYEONGGI DO SOUTH KOREA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chang, Jae Hyuk Seongnam-si, KR 20 39
Jo, Gug Rae Asan-si, KR 34 125
Kim, Sang-Mi Yongin-si, KR 12 72
Lee, Dae-Young Suwon-si, KR 109 609
Lee, Ki-Beom Seoul, KR 44 210
Lee, Seung-Jun Yongin-si, KR 188 1566
Lee, Seung-Min Jeju-si, KR 72 746

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