Surface annealing of components for substrate processing chambers

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United States of America Patent

PATENT NO 9481608
SERIAL NO

14088216

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Abstract

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A method of fabricating a processing chamber component comprises forming a processing chamber component having a structural body with surface regions having microcracks, and directing a laser beam onto the microcracks of the surface regions of the structural body for a sufficient time to heal and close off the microcracks by themselves.

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Patent Owner(s)

  • APPLIED MATERIALS, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bhatnagar, Ashish Fremont, US 40 514
Gopalakrishnan, Padma Fremont, US 9 99
Murugesh, Laxman San Ramon, US 29 2519

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