Polishing composition

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United States of America Patent

PATENT NO 9486892
APP PUB NO 20150344738A1
SERIAL NO

14440208

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Abstract

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[Problem] Provided is a polishing composition which is suitable for polishing a polishing object having a metal wiring layer and capable of diminishing the step defect while maintaining a high polishing rate.

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Patent Owner(s)

  • FUJIMI INCORPORATED

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hirano, Tatsuhiko Kiyosu, JP 23 225
Ishida, Yasuto Kiyosu, JP 21 48
Onishi, Shogo Kiyosu, JP 38 58

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